| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a high throughput in the patterning of a medium imprintable on a substrate. <P>SOLUTION: An actuator is disclosed that is equipped with: a body 40 having faces; and a plurality of parallel conduits 44 located in the body 40. Each of the conduits 44 is deformable in response to a proper pressure change in the conduit 44, by increasing the flow of a fluid in the conduit 44 or increasing a static pressure applied to the fluid in the conduit 44. A deformation of the conduit 44 causes a deformation of a face 42. <P>COPYRIGHT: (C)2011,JPO&INPIT |
