摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon nanotube assembly improved in the uniformity of carbon nanotube length. <P>SOLUTION: The method for manufacturing the carbon nanotube assembly is characterized in that catalyst particles are heated to the temperature where the degree of the aggregation of the catalyst particles and the growth rate of the carbon nanotube are balanced in a CVD process of growing carbon nanotubes by the thermal decomposition of an organic compound vapor with the catalyst particles formed on a substrate as a base point. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |