发明名称 METHOD FOR MANUFACTURING CARBON NANOTUBE ASSEMBLY
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon nanotube assembly improved in the uniformity of carbon nanotube length. <P>SOLUTION: The method for manufacturing the carbon nanotube assembly is characterized in that catalyst particles are heated to the temperature where the degree of the aggregation of the catalyst particles and the growth rate of the carbon nanotube are balanced in a CVD process of growing carbon nanotubes by the thermal decomposition of an organic compound vapor with the catalyst particles formed on a substrate as a base point. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010269982(A) 申请公布日期 2010.12.02
申请号 JP20090124220 申请日期 2009.05.22
申请人 NIKON CORP 发明人 TAKAHASHI YOHEI;KIKUCHI MAKIKO
分类号 C01B31/02;B01J23/75 主分类号 C01B31/02
代理机构 代理人
主权项
地址