| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge valve configured so that mounting operation can be further easily or rapidly performed by imparting bidirectionality to the valve, and the number of gas supply ports or the like can be also increased as needed, and a substrate storing container. SOLUTION: The purge valve includes a valve case 21 fitted to a through-hole 4 of a bottom plate 3 of a container body; a hollowed internal pressure regulating valve element 39 reciprocatingly inserted to the valve case 21 through a coil spring 27 to open and close the valve case 21; an external pressure regulating valve element 44 reciprocatingly inserted to the internal pressure regulating valve element 39 through a coil spring 41 to open and close the internal pressure regulating valve element 39; and a gas filtering filter 48 interposed between the valve case 21 and the internal pressure regulating valve element 39 and external pressure regulating valve element 44. When gas is distributed from one end toward the other end of the valve case 21, the external pressure regulating valve element 44 is moved backward to open the closed internal pressure regulating valve element 39, and when the gas is distributed from the other end toward one end of the valve case 21, the internal pressure regulating valve element 39 is moved backward to open the closed valve case 21. COPYRIGHT: (C)2011,JPO&INPIT |
