发明名称 Probe Microscope
摘要 An object of the present invention is to provide a probe microscope that permits qualitative and quantitative evaluation on ions existing near the surface of a sample and permits to detect further simply and easily such as impurities, flaws and corrosion origins existing on the sample in high sensitivity. A probe microscope according to the present invention is provided with a test cell that holds a sample and permits to receive liquid, a probe, a counter electrode, a reference electrode, a drive mechanism that causes the probe to follow the surface of the sample as well as to scan the same, a potential control portion that controls a potential between the probe and the reference electrode and a current measuring portion that measures a current flowing between the probe and the counter electrode, and is characterized in that the material of the probe is constituted by a conductive body containing any of gold or gold alloy, carbon or carbon compound, boron, zinc, lead, tin and mercury.
申请公布号 US2010306886(A1) 申请公布日期 2010.12.02
申请号 US20100789796 申请日期 2010.05.28
申请人 HITACHI, LTD. 发明人 HARADA MOTOKO;HONBO KYOKO;MABUCHI KATSUMI
分类号 G01Q30/00 主分类号 G01Q30/00
代理机构 代理人
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