| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage room of a liquid crystal substrate which effectively prevents a disturbance of air stream caused from an operation of a stacker crane being a transfer device installed in the storage room of liquid crystal substrate. SOLUTION: The storage room 10 of liquid crystal substrate includes a plurality of storage shelves 20 which stores cassettes each keeping a liquid crystal substrate, a stacker crane 30 which runs on a rail located along a plurality of storage shelves 20 and transfers the cassette, an exhaust means which exhausts the air inside of the room in front of the running direction of the stacker crane 30, a supply means which supplies the air of an amount of exhaust that the exhaust means exhausts in the rear of the running direction of the stacker crane 30, and a control means 60 which exhausts from the exhaust means an amount of air pushed away by the stacker crane 30, produced by a projection area and moved distance of the stacker crane 30, in accordance with the movement control signal of the stacker crane 30 and supplies the air from the supply means. COPYRIGHT: (C)2011,JPO&INPIT |
