| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray photoelectron spectroscopic analysis method preventing scattering of a powder sample by a simplified method, for solving the problem in a conventional method wherein, when a sample to be served to XPS (X-ray photoelectron spectroscopy) analysis is powder, there is a strong possibility that the powder sample is scattered in a device, to thereby cause an influence of contamination in the device on a measurement result or malfunction of device auxiliary equipment. SOLUTION: This X-ray photoelectron spectroscopic analysis method is described as follows: binder is mixed and dispersed into the powder sample; the powder sample into which the binder is mixed and dispersed is molded into tablets (pellets); the tablet is used as the sample; paraffine is used as the binder; a melting point of the paraffine is not lower than 44°C and not higher than 58°C; and a content rate of the paraffin is not less than 5 wt.% and not more than 10 wt.%. COPYRIGHT: (C)2011,JPO&INPIT
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