| 摘要 |
A method of fabricating a mask includes sequentially depositing a phase shift layer and a light shielding layer on a transparent substrate; forming a light shielding layer pattern and a phase shift layer pattern by selectively etching the light shielding layer and the phase shift layer; forming side walls on side faces of the phase shift layer pattern; cleaning the substrate formed with the side walls; and selectively removing a portion of the light shielding layer. The side wall can be formed of an oxide formed by oxidizing the side faces of the phase shift layer pattern.
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