Semiconductor material non-contactly characterizing device, has measurement electrodes capacitively and non-contactly coupling out produced surface voltages, and signal conditioning unit electrically connected with one electrode

摘要

The device has LEDs (2, 2') producing electrical surface voltages on a semiconductor material (1). A control device (3) is electrically connected with the LEDs for controlling the LEDs within a frequency range of 1 kilohertz to 100 kilohertz, Measurement electrodes (4, 5) e.g. wires, capacitively and non-contactly couples out the produced surface voltages. A signal conditioning unit (6) is electrically connected with one of the electrodes. An earthed metal grid (7) electromagnetically isolates the LEDs from one of the electrodes. Dull LEDs (9, 9') are provided parallel to the LEDs. An independent claim is also included for a method for non-contactly characterizing a semiconductor material.