发明名称 METHOD OF FORMING ORGANIC SEMICONDUCTOR FILM TO POLYSILSESQUIOXANE THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a method of uniformly forming an organic semiconductor film to a polysilsesquioxane thin film without incurring a deterioration in the characteristic of an organic semiconductor. SOLUTION: In the method of forming the organic semiconductor film to the polysilsesquioxane thin film, an organic semiconductor solution containing phenyl group-modified colloidal silica is applied onto the polysilsesquioxane thin film, and a coating film is dried. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010272816(A) 申请公布日期 2010.12.02
申请号 JP20090125632 申请日期 2009.05.25
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY;OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE;FUSO CHEMICAL CO LTD 发明人 MATSUKAWA KOYO;HAMADA TAKASHI;MICHIWAKI YOSHIKI;WATASE SEIJI
分类号 H01L29/786;C08J7/06;C09D5/00;C09D5/25;C09D7/12;C09D183/04;H01L21/336;H01L21/368;H01L51/05;H01L51/40 主分类号 H01L29/786
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