PHYSICAL QUANTITY SENSOR

摘要

Provided is a physical quantity sensor equipped with a beam-like vibrating body and a fixing part which supports both ends of the beam-like vibrating body. Furthermore, a driving element is formed in the central portion of the beam-like vibrating body, and a feedback element is formed on each side thereof. It is so arranged that the beam-like vibrating body is caused to perform natural vibrations, and the natural frequency of the vibrating body is detected, thereby making detection of physical quantities acting on the beam-like vibrating body. Owing to the above, physical quantities acting on objects, such as strains and loads, can be detected in a stable state.