| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve precise drive of mobile units not affected by measurement errors of measurement systems caused by inclination of the mobile units. <P>SOLUTION: A control unit drives a slight movement stage WFS, based on position information on a measurement direction of the slight movement stage WFS measured by the measurement system 70 and correction information of the measurement error caused by the inclination of the slight movement stage WFS included in the position information, thus achieving precise drive of the slight movement stage WFS not affected by the measurement error that is caused by the inclination of the slight movement stage WFS, and is included in the position information on the measurement direction of the measurement system. <P>COPYRIGHT: (C)2011,JPO&INPIT |
