发明名称 METHOD AND APPARATUS FOR PRODUCING CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a crystal by which a crystal can be extracted in a short period of time from a cooled and solidified flux. SOLUTION: A crucible 107 is stored in a process tank 300. Before or after the crucible 107 is put in the process tank 300, a flux process solution 301 is poured into the process tank 300. A seed substrate and a crystal 205 produced on the seed substrate, and a flux 204 covering the seed substrate and the crystal 205 are stored in the crucible 107. A tilting means is provided, which tilts the seed substrate with respect to the vapor-liquid interface of the flux process solution 301. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010269967(A) 申请公布日期 2010.12.02
申请号 JP20090122887 申请日期 2009.05.21
申请人 PANASONIC CORP 发明人 HATAYAMA TAKESHI;MINEMOTO TAKASHI;YAMAMOTO TAKEKATSU;YAMAZAKI DAIZO
分类号 C30B19/06;C30B29/38;C30B33/00;H01L21/208 主分类号 C30B19/06
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