| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharging device which can highly accurately specify a relative positional relationship between a stage and a liquid droplet discharging head on the basis of measured results of respective vibration, and is capable of highly accurate drawing by preventing the displacement of a landed position by a simple configuration. SOLUTION: The liquid droplet discharging device 1 includes the liquid droplet discharging head with many nozzles arranged along a direction X, and the stage 4 which moves while being mounted with a base material W in directions X and Y. The liquid droplet discharging device performs drawing by making liquid droplets discharged from the nozzles of the liquid droplet discharging head according to predetermined discharging timing landed to the base material W. The device is equipped with a first vibration measuring means 8A which is set on the stage 4 and measures the vibration of the stage 4, a second vibration measuring means 8B which is provided at the liquid droplet discharging head side and measures the vibration of the liquid droplet discharging head, and a correcting means which corrects the landed position of the liquid droplets from the liquid droplet discharging head according to a magnitude of relative displacement between the stage 4 and the liquid droplet discharging head by obtaining the size of the relative displacement from a difference of outputs of the first vibration measuring means 8A and the second vibration measuring means 8B. COPYRIGHT: (C)2011,JPO&INPIT |
