摘要 |
The embodiments describe an apparatus, in particular a microsystem, including a device for energy conversion, which device has apiezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy. The diaphragm structure being coupled to a transformer and it being possible to displace said diaphragm structure by moving the transformer, and it being possible to effect the movement of the transformer in a contact-free fashion by interaction of the transformer with a moving part.
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