Device for growth and removal of substance layers, has film, which is placed on cover surfaces of thermally conductive body, which is designed as cuboid or as cylinder

摘要

The device has a film (2), which is placed on the cover surfaces (9) of a thermally conductive body, which is designed as a cuboid or as a cylinder. The film terminates with the side surfaces (5) of the body and is fixed on the body at the cuboid by strips (6) or welding and at the cylinder by circumferential rings or welding in a sealing manner. The film end is connected with the film beginning along the cylinder.