发明名称 METHOD AND APPARATUS FOR MANUFACTURE OF VIA DISK
摘要 <p>Aluminum filled via disks are manufactured utilizing a plurality of drilled substrates placed into a metal can in a stacked, interdisposed assembly with a corresponding number of graphite molds. Aluminum infiltration ingots are added and the can is heated to a temperature to melt the ingots. The molten aluminum is pressurized so that it flows into the vias. The substrates are then cooled, removed from the can, separated from between the graphite molds, and the flat surface faces are ground and polished to expose the filled vias.</p>
申请公布号 KR20100126714(A) 申请公布日期 2010.12.02
申请号 KR20107019122 申请日期 2009.01.30
申请人 INNOVENT TECHNOLOGIES, LLC 发明人 VAN DEN HOEK WILLIBRORDUS GERARDUS MARIA;KILKELLY MICHAEL;FAWKES DANE;TWAALFHOVEN FELIX
分类号 H01L21/48 主分类号 H01L21/48
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