| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress light use efficiency from lowering, by maintaining adhesion to a resin molding of an antireflection film, even after the formation of the antireflection film. <P>SOLUTION: In a method of manufacturing an objective lens OBJ of NA≥0.8, the manufacturing method includes a process for forming a molding, with an optical path difference giving structure on an optical face by molding a cycloolefin resin; a process for annealing the molding, at a temperature lower by 10°C or more than the glass transition temperature of the resin (temperature measured at 10°C/min of a temperature increase speed by a specific differential scanning calorimetric analysis method); and a process for forming the antireflection film on the optical face which provides the optical path difference imparting structure of the molding, after annealing. <P>COPYRIGHT: (C)2011,JPO&INPIT |
