STABILIZED AMMONIUM PERSULFATE AQUEOUS SOLUTION, COMPOSITION FOR CHEMICAL MACHINERY POLISHING AND CHEMICAL MACHINERY POLISHING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a stabilized ammonium persulfate aqueous solution including ammonium persulfate of the high concentration, by reducing an adverse influence of a stabilizer effected on CMP. SOLUTION: This ammonium persulfate aqueous solution is stabilized by ammonium bicarbonate. The stabilized ammonium persulfate aqueous solution is characterized in that the mass ratio of the ammonium persulfate and ammonium bicarbonate is 3:1 to 15:1. COPYRIGHT: (C)2011,JPO&INPIT