| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump having excellent usability even when being used so as to be controlled or monitored by an external device. SOLUTION: A vacuum pump includes a pump body 1 which carries out evacuation by rotating a rotor formed with a rotary blade at high speed with a motor 11 and a power supply device 2 which drives and controls the motor 11. The power supply device 2 includes a communication interface 24 for executing pump control such as monitoring of a pump control state and start/stop by an external device 3, and storage medium 23 for storing and holding in advance a software for executing pump control such as monitoring of a pump control state and start/stop through the communication interface 24, and outputs the software stored and held in the storage medium 23 to the external device 3 through the communication interface 24. COPYRIGHT: (C)2011,JPO&INPIT
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