发明名称 METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE DEDICATED TO SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A method for manufacturing a semiconductor substrate dedicated to a semiconductor device, in which multi-photon absorption is generated in a micro-region inside the semiconductor substrate by condensing laser beams in any micro-region inside the semiconductor substrate, and a gettering sink is formed by changing the crystal structure of only the micro-region.
申请公布号 US2010304552(A1) 申请公布日期 2010.12.02
申请号 US20100787750 申请日期 2010.05.26
申请人 SUMCO CORPORATION 发明人 KURITA KAZUNARI
分类号 H01L21/322;B23K26/00 主分类号 H01L21/322
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