发明名称 System for Diagnosis and Treatment of Photovoltaic and Other Semiconductor Devices
摘要 A diagnostic and self-healing treatment system for a semiconductor device, the system provides: i) a shunt busting/blocking treatment, ii) self-healing treatment, and iii) an in-situ non-contact diagnostic determination.
申请公布号 US2010304512(A1) 申请公布日期 2010.12.02
申请号 US20080744762 申请日期 2008.11.26
申请人 UNIVERSITY OF TOLEDO 发明人 KARPOV VICTOR G.;SHVYDKA DIANA
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
代理机构 代理人
主权项
地址