发明名称 HIGH GAIN MINIATURE POWER SUPPLY FOR PLASMA GENERATION
摘要 A high gain pulse generator includes a piezoelectric transformer (PT) that is driven by an input power stage to drive the PT at a desired PT resonant frequency such that at least one PT characteristic substantially matches at least one non-linear load characteristic such as, without limitation, a plasma load characteristic to deliver a desired pulse to the non-linear load.
申请公布号 US2010301702(A1) 申请公布日期 2010.12.02
申请号 US20090472556 申请日期 2009.05.27
申请人 GENERAL ELECTRIC COMPANY 发明人 TAO FENGFENG;BENNETT, JR. GROVER ANDREW;MUELLER FRANK JAKOB JOHN;MURRAY ROBERT CARL;SADDOUGHI SEYED GHOLAMALI;ALLEN EDWARD HENRY
分类号 H01L41/107 主分类号 H01L41/107
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