Gap control for die or layer bonding using intermediate layers

摘要

A structure having a gap provided between a portion of two layers that are joined together is disclosed. The structure includes a first layer having an element formed within a first surface and a second layer having a second surface, adjacent to and in direct contact with at least a portion of the first surface on all sides of the element such that the element is completely enclosed. A recess of predetermined depth is arranged to provide the gap between the element and the second surface, and a groove formed in one of the first surface or second surface, the groove defining a boundary around the element. Sealing material is deformedly retained completely within the groove to form a seal around the element, such that the recess defines the gap.