Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
申请公布号
US2010300361(A1)
申请公布日期
2010.12.02
申请号
US20100786639
申请日期
2010.05.25
申请人
ROHM AND HAAS ELECTRONIC MATERIALS LLC
发明人
SHENAI-KHATKHATE DEODATTA VINAYAK;TIMMONS MICHAEL L.;MARSMAN CHARLES J.;WOELK EGBERT;DICARLO, JR. RONALD L.