| 发明名称 |
MASK FOR SOLIDIFICATION, METHOD FOR SOLIDIFY AND METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL INCLUDING THE METHOD |
| 摘要 |
<p>A crystallization mask for laser illumination for converting amorphous silicon into polysilicon is provided, which includes: a plurality of transmissive areas having a plurality of first slits for adjusting energy of the laser illumination passing through the mask; and an opaque area.</p> |
| 申请公布号 |
KR100997971(B1) |
申请公布日期 |
2010.12.02 |
| 申请号 |
KR20030082222 |
申请日期 |
2003.11.19 |
| 申请人 |
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发明人 |
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| 分类号 |
G02F1/13;G02F1/1362;B23K26/06;H01L21/20;H01L21/268;H01L21/336;H01L29/786;H01L51/50;H05B33/10 |
主分类号 |
G02F1/13 |
| 代理机构 |
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代理人 |
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| 地址 |
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