| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein, when inspecting at high speed, a defect caused by a plane abnormality such as a projection, a hollow or a fold on a film, selective detection of only the plane abnormality is very difficult by a surface inspection device of a system for inspecting a reflectance or a transmittance, and further, in a detection method by irregularity measurement using laser light, an inspection range is restricted by the size of a lens. SOLUTION: This optical scanning type plane inspection device includes an optical scanning means for scanning a plane linearly with light emitted from a light source, a diffusion plate for receiving transmitted light or reflected light from the plane and a plane abnormal part by scanning light, a reflected light position detection means for receiving a light spot projected onto the diffusion plate through an imaging lens, and an angle inspection measuring part for inspecting a plane abnormality by calculating an angle of the plane abnormal part by a detection signal from the detection means. COPYRIGHT: (C)2011,JPO&INPIT
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