| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device suppressing a breakage of a workpiece caused by dropped abrasive grain or the like during the grinding. SOLUTION: The grinding device is provided with: a holding table for rotatably holding a workpiece supported by an opening part of an annular frame through an adhesion tape; and a grinding means having a grinding stone for grinding the workpiece held by the holding table. The holding table includes: an absorption chuck having an absorption surface for absorbing and holding the adhesion tape adhered by the workpiece; a frame body for surrounding the absorption chuck; and a frame fixing means for fixing the annular frame. The absorption surface is provided with: a central point absorption surface for absorbing and holding the part out of the adhesion tape where the workpiece is attached; and an outer circumferential absorption surface for absorbing and holding the part surrounding the central point absorption surface and without the workpiece attached out of the adhesion tape. The central point absorption surface protrudes from the outer circumferential absorption surface by the predetermined height. COPYRIGHT: (C)2011,JPO&INPIT |
