| 发明名称 |
FLEXIBLE MICRO/NANOFLUIDIC DEVICES |
| 摘要 |
The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.
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| 申请公布号 |
US2010304306(A1) |
申请公布日期 |
2010.12.02 |
| 申请号 |
US20070301967 |
申请日期 |
2007.05.22 |
| 申请人 |
IKERLAN CENTRO DE INVESTIGACIONES |
发明人 |
BLANCO BARRO FCO. JAVIER;AGUIRREGABIRIA IZAGUIRRE MARIA;EZKERRA FERNANDEZ AITOR;SCHULZE JANETTE LILLIA;RUANO LOPEZ JESUS MIGUEL;ORIA MAYORA |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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