PROTON BEAM ASSISTED ULTRAPRECISE PROCESSING METHOD FOR PROCESSING SINGLE-CRYSTAL FRAGILE MATERIAL

摘要

A proton beam assisted ultraprecise processing method for processing single-crystal fragile material includes the following steps: a) utilizing a simulation software to simulate processing parameters according to a cutting depth, a surface roughness or other processing requirements; b) using particle beams to bombard or irradiate a surface of a single-crystal fragile material to be processed, and applying energy and dosage obtained by the simulation result; c) utilizing an ultraprecise cutting technology to perform an ultraprecise cutting processing on the single-crystal material bombarded by the particle beams; and d) testing the surface quality of the processed material, and comparing the improvement condition of the quality of the processed surfaces. The processing method of the invention can remarkably improve the processing precision and the surface roughness of the fragile material and greatly reduce the abrasion of tools.