发明名称 FLUID PRESSURE SENSOR
摘要 <p>A fluid pressure sensor configured in such a manner that a fluid to be measured is not retained, contamination is suppressed, and the diameter of a pipe in which the fluid to be measured flows can be freely selected. A fluid pressure sensor comprising a pipe in which fluid can flow and a pressure sensing section which has a plate-like piezoelectric element and sensing the pressure of the fluid which flows within the pipe. The pipe consists of an elastically deformable material and has in the outer surface thereof a recess formed so as to reduce the wall thickness of the pipe. The pressure sensing section is configured in such a manner that the tip thereof is in contact near the recess with the outer surface of the pipe so that the side peripheral surface of the tip of the piezoelectric element is subjected to the pressure of the fluid.</p>
申请公布号 WO2010137391(A1) 申请公布日期 2010.12.02
申请号 WO2010JP54868 申请日期 2010.03.19
申请人 SATOH TAKAMI;TOKYO ELECTRON LIMITED;ANDO RYOJI;TOMIOKA KIICHIRO 发明人 SATOH TAKAMI;ANDO RYOJI;TOMIOKA KIICHIRO
分类号 G01L9/00 主分类号 G01L9/00
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