<p>A paddle for the production of semiconductor wafers is provided. The paddle can be a cantilever paddle made of a ceramic such as silicon carbide and can be used with round or square wafers, such as photovoltaic wafers. The paddle exhibits excellent deflection and strength characteristics.</p>
申请公布号
EP2255384(A2)
申请公布日期
2010.12.01
申请号
EP20090712940
申请日期
2009.02.20
申请人
SAINT-GOBAIN CERAMICS & PLASTICS, INC.
发明人
KAEMPFE, SCOTT A.;KENNEY, MICHAEL P.;DWYER, KAREN A.;ZHANG, PENG
