METHOD FOR MEASURING THREE DIMENSIONAL SHAPE

摘要

PURPOSE: A method for measuring a three dimensional shape is provided to accurately measure the height according to each position of an object on every position including a shadow area and a saturation area. CONSTITUTION: A method for measuring a three dimensional shape comprises following steps. Grating patterns applied in multiple directions are multiply moved and emitted on an object, grating pattern lights reflected from an object(10) are successively detected, and pattern images of the object are obtained. Phase and brightness are extracted from each pattern images to correspond to each position of an X-Y coordinate system. Initial height is calculated from the phase in each direction. The height weighted value is calculated in each direction using the weighted value.