发明名称 |
Transmission electron microscope with electronic spectroscope and method of displaying spectral image |
摘要 |
In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided.
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申请公布号 |
EP2256780(A2) |
申请公布日期 |
2010.12.01 |
申请号 |
EP20100008339 |
申请日期 |
2008.01.24 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TERADA, SHOHEI;TANIGUCHI, YOSHIFUMI |
分类号 |
H01J37/26;H01J37/05;H01J37/09;H01J37/244;H01J37/295 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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