PURPOSE: An apparatus for thin layer deposition is provided to improve deposition efficiency by retrieving the deposition material deposited on a shielding wall assembly by separating the deposition space from an external space. CONSTITUTION: A substrate(160) is arranged within a chamber. A deposition source(110) is arranged on a side opposing the substrate. The deposition source comprises a crucible(111) and a heater(112) heating the crucible. A first nozzle(120) is arranged on the side facing substrate in the deposition source.
