SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE POSITIONING APPARATUS,申请号KR20050081852-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE POSITIONING APPARATUS
摘要
申请公布号	KR100997829(B1)	申请公布日期	2010.12.01
申请号	KR20050081852	申请日期	2005.09.02
申请人		发明人
分类号	H01J9/20;B05C5/02;H01J9/48;H01J11/02;H01L21/027;H01L21/68	主分类号	H01J9/20
代理机构		代理人
主权项
地址

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