发明名称 Fabrication of Metallic Stamps for Replication Technology
摘要 <p>The electrodeposited Nickel stamp is replicated from a conductive master, e.g. Titanium metallic master instead of a photoresist patterned master. The conductive layer is served as a working electrode in the subsequent electrodepositing of the Nickel metal. After the electroplating, Nickel stamps are obtained by peeling the Nickel metal sheet off the conductive layer of the metallic master. Low adhesion between metallic master and Nickel stamp make it possible to delaminate the Nickel stamp without any defects.</p>
申请公布号 EP2256549(A1) 申请公布日期 2010.12.01
申请号 EP20100162326 申请日期 2010.05.07
申请人 OBDUCAT AB 发明人 HEIDARI, BABAK
分类号 G03F7/00;B29C33/00 主分类号 G03F7/00
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