| 摘要 |
PURPOSE: A substrate processing apparatus is provided to automatically change the width of a substrate guiding part based on a pre-set program and information related to the size of a substrate. CONSTITUTION: A substrate transferring part transfers a substrate(S) to a treatment bath. A pair of substrate guiding parts(110, 120) is arranged on both lateral sides of the substrate transferring part. The substrate guiding parts define the transferring location of the substrate. The substrate guiding parts include roller plates(111, 121), roller supporting stands(112, 122), side rollers(114, 124). A regulating part(130) regulates the width of the guiding parts according to the size of the substrate.
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