| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that a substrate is enlarged further accompanying the enlargement of a liquid crystal display device or the like and the substrate cannot be accurately held by a conventional substrate holding device. SOLUTION: The substrate holding device 10 for performing skew adjustment of changing the tilt of the substrate in an erected state includes a plurality of holding units 17 for holding the substrate 13 from below, a support block 15 for supporting the holding units 17 by a support surface, and a first slide mechanism 20 for sliding and moving the support block 15 to the holding units 17. The height of the support surface 15a of the support block 15 is changed depending on the slide amount dy of the first slide mechanism 20, and the displacement amount dz/dy of the height to the slide amount dy of the holding units 17 is different for the respective holding units 17. COPYRIGHT: (C)2009,JPO&INPIT |
