DROPLET EJECTING DEVICE AND METHOD FOR MANUFACTURING DROPLET EJECTING DEVICE

摘要

Provided are a droplet discharge device in which a discharge amount of droplets is increased and a method of manufacturing the droplet discharge device. The droplet discharge device has a structure in which a plurality of vibrators are arranged in a regular manner on an upper surface of a substrate. The substrate has a structure in which a cavity which serves as a cavity and a discharge hole and a supply hole which serve as a flow path of a liquid are formed inside a plate including substantially flat upper surface and lower surface. A lateral width of the cavity becomes narrower from the upper surface side of the substrate toward the lower surface side of the substrate. In addition, a depth of the cavity becomes deeper from the supply hole side toward the discharge hole side. The depth of the cavity may be made to become shallower from the supply hole side toward the discharge hole side in a part which is positioned on the supply hole side and occupies a relatively small area, and the depth of the cavity may be made to become deeper from the supply hole side toward the discharge hole side in a part which is positioned on the discharge hole side and occupies a relatively large area. The substrate is manufactured by press-fitting a die having a three-dimensional shape corresponding to a three-dimensional shape of the cavity to an upper surface of a green sheet.