| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inexpensive wafer support member, holding tool and holding device, which can fully suppress slippages without impairing productivity in the high temperature heat treatment of a silicon wafer. SOLUTION: The support member is arrange on the wafer-holding tool, and the wafer is placed on an upper part. The support member is constituted of three structures which are an upper part 21, an intermediate part 22 and a lower part 23. In the wafer support member, the material of the intermediate part structure 22 is constituted of a soft material, softened at a wafer thermal treatment temperature.</p> |
