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发明名称
摘要
申请公布号
JP4589838(B2)
申请公布日期
2010.12.01
申请号
JP20050212133
申请日期
2005.07.22
申请人
发明人
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
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