发明名称 |
USING ISOLATION DC-DC, MCU AND OPTO-COUPLER IN INTELLIGENT HIGH-PRECISION HIGH-VOLTAGE POWER SUPPLY FOR ION BEAM AND ELECTRON BEAM CONTROL |
摘要 |
PURPOSE: A method of using isolation DC-DC, MCU and opto-coupler in intelligent high-precision high-voltage power supply for an ion beam and an electron beam control are provided to electrically isolate high voltage and low voltage by using an opto-coupler to transmit the signal of a high voltage part and a low voltage part. CONSTITUTION: A power supply unit supplies floating power to as the controller of a floating electrode. The power supply unit electrically isolates from the output value of the floating electrode through an opto-coupler. The power supplies receives a feedback signal. A controller and an output unit has an MCU to perform precise control. The controller is comprised of an ACC voltage controlling part, a heater, and an Ext and a Sup voltage controlling part.
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申请公布号 |
KR20100125906(A) |
申请公布日期 |
2010.12.01 |
申请号 |
KR20090044861 |
申请日期 |
2009.05.22 |
申请人 |
FTLAB |
发明人 |
CHO, SEOK HO;KIM, YOUNG GWEON;KO, JAE JUN |
分类号 |
H01J29/46;H01J27/02;H01J29/96 |
主分类号 |
H01J29/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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