| 摘要 |
An electromechanical filter of the present invention is an electromechanical switch formed on a substrate. The switch has a fixed electrode which is to become a signal transmission line, and a movable electrode formed in a levitating manner while being spaced from the fixed electrode with a gap therebetween. An insulating film is provided on the fixed electrode, and an actuator is formed around the movable electrode formed on a post section. Thereby, an electromechanical switch equipped with a movable electrode fixing mechanism which prevents occurrence of self-actuation, which has hitherto been difficult to realize, is materialized.
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