发明名称 Fabricating electronic-photonic devices having an active layer with spherical quantum dots
摘要 A method for manufacturing an electronic-photonic device. Epitaxially depositing an n-doped III-V composite semiconductor alloy buffer layer on a crystalline surface of a substrate at a first temperature. Forming an active layer on the n-doped III-V epitaxial composite semiconductor alloy buffer layer at a second temperature, the active layer including a plurality of spheroid-shaped quantum dots. Depositing a p-doped III-V composite semiconductor alloy capping layer on the active layer at a third temperature. The second temperature is less than the first temperature and the third temperature. The active layer has a photoluminescence intensity emission peak in the telecommunication C-band.
申请公布号 US7842595(B2) 申请公布日期 2010.11.30
申请号 US20090397739 申请日期 2009.03.04
申请人 ALCATEL-LUCENT USA INC. 发明人 SAUER NICK;WEIMANN NILS;ZHANG LIMING
分类号 H01L21/28;H01L21/3205 主分类号 H01L21/28
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