Secondary electron detection system for scanning electron microscope

摘要

The secondary electron detector unit for a scanning electron microscope is mounted in a head body ( 1 ). In the lower part of the head body ( 1 ), a lower throttling aperture ( 2 ) is placed. Above the lower throttling aperture ( 2 ), the microporous plate ( 3 ) is sealed in the head body ( 1 ) by a gasket ( 5 ) and fastened with the use of the frame plate ( 6 ) which has an opening that exposes the active input area ( 7 ) placed asymmetrically with respect to the axis of the scanning electron beam (WE). Above the microporous plate ( 3 ), the scintillator ( 11 ) and the light pipe ( 12 ) are fixed at the side of the head body ( 1 ).