ADVANCED PROCESS SENSING AND CONTROL USING NEAR INFRARED SPECTRAL REFLECTOMETRY,申请号KR20107021767-传众专利搜索

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发明名称	ADVANCED PROCESS SENSING AND CONTROL USING NEAR INFRARED SPECTRAL REFLECTOMETRY
摘要
申请公布号	KR20100125370(A)	申请公布日期	2010.11.30
申请号	KR20107021767	申请日期	2009.02.17
申请人	APPLIED MATERIALS, INC.	发明人	DAVIS MATTHEW FENTON;LIAN LEI
分类号	H01L21/66;H01L21/3065	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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