发明名称 Ultraviolet detecting device and manufacturing method thereof, and ultraviolet quantity measuring apparatus
摘要 The present invention provides an ultraviolet detecting device which comprises a silicon semiconductor layer having a thickness ranging from greater than or equal to 3 nm to less than or equal to 36 nm, which is formed over an insulating layer, lateral PN-junction type first and second photodiodes formed in the silicon semiconductor layer, an interlayer insulating film formed over the silicon semiconductor layer, a first filter layer made of silicon nitride, which is formed over the interlayer insulating film provided over the first photodiode and causes light lying in a wavelength range of an UV-B wave or higher to pass therethrough, and a second filter layer made of silicon nitride, which is formed over the interlayer insulating film provided over the second photodiode and allows light lying in a wavelength range of an UV-A wave or higher to pass therethrough.
申请公布号 US7843031(B2) 申请公布日期 2010.11.30
申请号 US20080036016 申请日期 2008.02.22
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 MIURA NORIYUKI;CHIBA TADASHI
分类号 H01L29/78 主分类号 H01L29/78
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