| 摘要 |
A SAW based pressure sensor having a base 2a with an aperture 3 formed therein and a substrate 4 mounted on the base so as to completely overlie the aperture. The substrate 4 is adhered to base 2a so as to form a fluid tight seal around the periphery of the aperture 3. A first SAW resonator 5 is mounted on the substrate 4 wholly within the region overlying the aperture 3, with two further SAW resonators 6, 7 being mounted on the substrate wholly within a region which is stiffened by adhesion to the underlying base 2a , such that the two further SAW resonators 6, 7 are completely decoupled from the strain field arising in the substrate due to deflections thereof.
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