APPARATUS FOR GENERATING PLASMA

摘要

PURPOSE: An apparatus for generating plasma is provided to install another plasma generation gas injection path for the secondary supply of a plasma generation gas, thereby stably generating plasma. CONSTITUTION: A cathode electrode(110) is installed in the lower part of a cathode assembly(100). An anode electrode(210) surrounds the cathode electrode. An anode assembly(200) includes the anode electrode and plasma generation gas injection paths. If a high voltage is applied to the cathode electrode, plasma is generated between the anode electrode and the cathode electrode. The plasma generation gas injection paths inject a plasma generation gas to a plasma generation space. At least one magnetism generating unit(311~317) generates a magnetic force.