发明名称 Norbornene polymer for photoresist and photoresist composition comprising the same
摘要 Disclosed herein is a photoresist composition which includes a norbornene copolymer having an epoxy group, an acid generator, and an organic solvent. The norbornene polymer shows superior mechanical and thermal properties, high transparency, excellent insulating properties, and particularly, improved mechanical properties due to the presence of an epoxy group. The photosensitive resin composition shows superior performance, e.g., transparence, developing properties, residual film characteristics, chemical resistance, heat resistance, and flatness. Particularly, since the photosensitive resin composition enables easy formation of a pattern as an interlayer insulating film and shows a high light transmittance even when being formed into a thin film with a relatively large thickness, it is suitable for the production of an interlayer insulating film used in the fabrication processes of LCDs.
申请公布号 US7842441(B2) 申请公布日期 2010.11.30
申请号 US20080272168 申请日期 2008.11.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE JAE JUN;KIM DO YUN;JUNG MYUNG SUP
分类号 G03F7/30 主分类号 G03F7/30
代理机构 代理人
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